Coating Polyimide

Coating Polyimide – Benchtop Automated Thin Film Coating Machine – Cheersonic

Ultrasonic spray coating systems are proven for various applications in which uniform, repeatable coatings of photoresist or polyimide films are required.

Based on below application,
a. Substrate: silicon wafer with micron thick of layer polyimide
b. Silicon wafer area: 80cm^2
c. Liquid: montmorillonite, polyvinyl alcohol, and deionized water

I recommend the ultrasonic spray coating machine UAM4000L, the configuration is as below.
1. Exercise system: coordinated motion in X-Y-Z axes
2. Control System: 7 inch touch screen with user friendly interface R&D embedded system, 3 user log in levels – Operator, Supervisor and Engineer
3. Cargo system: spray area of 150*150mm/300*300mm/400*400mm
4. Ultrasonic system: 1 set of ultrasonic spray system, focused type nozzle (spray width of 2-10mm) or wide type nozzle (spray width of 10-60mm)
5. Liquid supply system: 1 piece precision syringe pump and 1 set of precision syringe
6. Exhaust system and Lighting system