Deposition of Thin Photoresist Films
Deposition of Thin Photoresist Films Ultrasonic Coating Deposition of Thin Photoresist Films - Cheersonic The new UAM6000 system is a full coating solution, configured with ultrasonic spray shaping nozzles, depending upon coating requirements. These nozzles feature up to 90% reduction in material consumption, non-clogging performance, precise control of droplet size, and repeatable spray patterns at ultra-low flow rates. UAM6000 unique system features include: · Automated spray coating with recipe storage [...]