Technical characteristics of micromachining process
Technical characteristics of micromachining process Silicon micromachining technology is developed from semiconductor integrated circuit technology. First of all, it draws on the mature microfabrication technology in the integrated circuit process, such as: photolithography, diffusion, ion implantation, epitaxy and film deposition. In addition, after more than 20 years of development, silicon micromachining technology has formed its own characteristics. Unlike the planar technology of integrated circuits, micromachining is basically a bulk processing [...]