Deposition of Thin Photoresist Films

Ultrasonic Coating Deposition of Thin Photoresist Films – Cheersonic

The new UAM6000 system is a full coating solution, configured with ultrasonic spray shaping nozzles, depending upon coating requirements. These nozzles feature up to 90% reduction in material consumption, non-clogging performance, precise control of droplet size, and repeatable spray patterns at ultra-low flow rates.

UAM6000 unique system features include:

· Automated spray coating with recipe storage
· Designed for 100, 150, 200, and 300mm wafers
· Precision temperature control
· Integrated wafer lockdown
· Simple manual operator load / unload design
· Highly repeatable photoresist delivery pump with automated refill
· Manual wafer load/unload
· Highly repeatable, stable process

Chinese Website: Cheersonic Provides Professional Coating Solutions