Photoresist Ultrasonic Spraying

Photoresist Ultrasonic Spraying – Photoresist Spraying – Cheersonic

Micro Electro Mechanical System (MEMS) is a manufacturing technology platform developed on the basis of semiconductor manufacturing technology. MEMS technology uses a series of existing technologies and materials such as lithography, corrosion, and thin film in semiconductor technology. MEMS devices use silicon as the main material. Hundreds of thousands of micro-electromechanical devices or complete MEMS can be manufactured on a silicon chip with silicon micromachining technology, which has the advantages of small size and light weight.

In the photolithography process, it is necessary to coat a layer of photoresist with good adhesion, proper thickness and uniform thickness on the surface of the silicon wafer. The photoresist coating technology generally adopts the spin coating method. Since there are often grooves with a large aspect ratio on the silicon surface, the spin coating method will cause problems such as bubbles in the grooves and poor photoresist coverage on the upper surface. Solvents are used in the industry. Pre-soaking and post-coating low-pressure method to eliminate bubbles and improve poor coverage, but the effect is not good; in order to solve this problem, the photoresist ultrasonic atomization spraying method was born, which solved the above problems to a certain extent. Cheersonic’s ultrasonic photoresist spraying machine sprays uniform particles, strong filling ability, and good coverage of the bottom of the groove.

About Cheersonic

Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.

Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.

Chinese Website: Cheersonic Provides Professional Coating Solutions