Spray Coating Photoresists
Spray Coating Photoresists – Ultrasonic Spray Nozzle – Cheersonic
Cheersonic focused on the ultrasonic coating technology more than 20 years. We have much experience in spraying photoresist fields.
UAM4000L ultrasonic spraying machine is a popular equipment in experimental research and development and small batch production, which can be used in the following cases:
Liquid: photoresists
Thickness of film: 2um to 35 um
Size of substrate: diameter of 65-200mm
Features of UAM4000L Sprayer：
(1)Programmable bench top XYZ three axis exercise ultrasonic spray coating machine UAM4000L and is installed with one set of 120kHz ultrasonic coating system
(2) All anti-corrosion and non-clogging ultrasonic nozzles developed by Cheersonic shown create precise, repeatable, controllable, low-volume atomized spray patterns. There are two typical shape types of nozzles could be chosen: focused type with straight line shape (the width of shape: 1-10mm) or wide type with fan shape (the width of shape:10-60mm) for choose. For the diameter of 65-200mm, I recommend wide type. In addition, the width of the shape is controlled by adjusting the distance between nozzle and substrate, flow rate, carry gas etc.
(3) 300*300mm of combination heat and vacuum substrate plate: the max heating is up to 150℃. It could finish adsorption and heating simultaneous to improve the uniformity of the film.
(4) The liquid delivery system including syringe pump and glass syringe of 25ml/50ml/100ml to realize ultra low flow rate control.
(5) The machine is installed with intelligent programming system and friendly operation system.
(6) The vibration from ultrasonic nozzle continuously beak up agglomerated particles and keep them evenly dispersed. And it can maximize the consistency of the liquid characteristics during the spraying process.
(7) Up to 80% reduction in material consumption. Uniform and controllable coating thickness meet from ten nanometers to tens of micrometers. Coating uniformity>95%.
Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.