Spray Photoreists Coating System

UAM6000 Ultrasonic Spray Photoreists Coating System is an industrial-grade spraying equipment, which can meet the production needs of small and medium batches. Using national patented ultrasonic spraying technology, it is used to prepare uniform and controllable photoreists film coatings and applied in the field of spray pyrolysis.

1. Thickness range 1-100 μm
2. Uniformity ±5%
3. Coating area / substrate size 300×300 mm / 350×350 mm
4. Compatible Viscosity < 25 cps (It is according to the thickness)
5. Coating temperature range 150 ℃
6. The machine UAM6000 could coat in vacuum / inert atmosphere.
7.Nozzle customizability
8. Nozzle rotation / tilting available ? There are two types nozzle for difference function. tilting: focused type nozzle ; rotation: wide type nozzle
9. Pedestal rotation optional
10. Liquid delivery system