Ultrasonic Atomization Spraying of Photoresist

Photolithography technology refers to the technology of transferring the pattern on the mask plate to the substrate by means of photoresist (also known as photoresist) under the action of light. In the photolithography process, photoresist coating is an important technical link.

The existing coating methods of photoresist mainly include spin coating method and spray method.

The ultrasonic atomization spray coating method can be flexibly applied to various surface types of substrates, both for flat substrates and for curved substrates. It also has the characteristics of saving photoresist, strong repeatability, good coating uniformity, easy control of coating thickness and roughness, etc.

Ultrasonic atomization spraying can produce micron-sized photoresist droplets through the ultrasonic oscillation of the ultrasonic nozzle, which can reduce the influence of photoresist hydrodynamics. During the coating process, the wafer is slowly rotated while the swing arm moves across the entire wafer. The lower rotation speed can reduce the effect of centrifugal force. At the same time, this rotation also allows the photoresist to completely cover all angles of the entire deep hole.

Ultrasonic spraying photoresist can save 70% photoresist solution than centrifugal coating method. The reproducibility is also relatively high. For all wafers with holes of the same size, regardless of the position of the holes, the thickness of the photoresist is reproducible. There is no orientation effect in the spraying process, and the uniformity is higher. The ultrasonic spraying process is not limited to the underlying material and can be applied to both insulators and conductor layers. These advantages are beneficial to the application of ultrasonic atomization spraying method in commercial production.

About Cheersonic

Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.

Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.

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