Ultrasonic Spraying Machine For Photoresist

Ultrasonic Spraying Machine For Photoresist – Coating Nozzles – Cheersonic

UAM6000 ultrasonic spraying machine is suitable for mass production and continuous spraying, and the maximum substrate size for spraying is 500*500mm.

Ultrasonic coating of Cheersonic is a unique, environmentally-friendly, low velocity spray technology that creates micro thickness, very uniform protective and functional thin film with no clogging and very little overspray.

Applicable case, like,

1: Substrate material: Si, Glass, Ceramics (flat surfaces, May be structured)
2: Substrate size: 400mm x 400mm
3: Thickness range: 0,3 mm – 1,5mm
4: Process: Apply adhesion promoter + Bake, apply Photoresist + Bake.

Apply adhesion promoter:
Viscosity:0,4 cPs
Solvent based
Very wetting material
Layer thickness: as thin as possible (<<50nm)

Photoresist:
Viscosity range:2 cPs – 200 cps (dependent on layer thickness and PR)
Most of the Photoresist materials are solvent less
Target Layer thickness: <1- 40um
Target Layer uniformity:
<1- 1 um: Variance blow 1 um (±30%)
~ 10 um: Variance ±2 um (±20%)
~ 20 um: Variance ±2 um (±15%)
5: Bake temperature Range: RT to 120℃.
6: No Droplet on substrates
7: Clean room environment.

Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.